PHI 595 Multiprobe System
The PHI Multiprobe includes a 595 Scanning Auger electron spectroscopy (AES), combined with an X-ray photoelectron spectroscopy (XPS), and secondary ion mass spectroscopy (SIMS). The multiple analysis techniques contained within this ultra-high vacuum chamber allow us to analyze most materials.
PHI Model 590 Scanning Auger Electron Spectroscopy
The laboratory contains a dedicated PHI 590 Auger spectroscopy available to graduate students for research purposes. This system has an argon ion sputter gun and the same software and abilities to produce Auger chemical maps and SED images as the PHI 595 Multiprobe system. The PHI 590 Auger spectroscopy possesses a much high sensitivity than PHI 595 Auger system and is particularly suitable for analyzing elements with low concentration.
VG Scientific X-ray Photoelectron Spectroscopy
The VG Scientific ESCALAB MKII spectroscopy includes aluminum /magnesium, silver/titanium twin anodes and monochromator X-ray sources. It is equipped with a hemispherical analyzer and an ion sputtering gun for sample cleaning and etching. The ESCALAB MKII XPS presents an excellent analysis capability to problems related to thin film, junction, solder ability, corrosion, discoloration, contamination, cleaning, adhesion, adsorption or surface processing.
Zygo 3-D Optical Scanning Interferometer Profilometer
The Zygo white light interferometric profilometer offers fast, non-contact, high accuracy, 3D metrology of surface features for a wide variety of samples. The software provides graphic images and high-resolution numerical analysis to characterize the surface structure of materials at magnifications up to 2000X.